Treatment liquid supply apparatus and substrate treatment apparatus including the same
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United States of America Patent
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Sep 30, 2014
Grant Date -
Sep 17, 2009
app pub date -
Feb 12, 2009
filing date -
Mar 11, 2008
priority date (Note) -
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Abstract
A treatment liquid supply apparatus supplies a treatment liquid to a predetermined object for treatment of a substrate, and recovers the supplied treatment liquid for reuse. The apparatus includes: a first tank in which the treatment liquid to be supplied to the object is stored; a second tank in which the treatment liquid recovered from the object is stored; a transfer unit which transfers the treatment liquid from the second tank to the first tank; a first temperature regulating unit which regulates the temperature of the treatment liquid to be supplied from the first tank to the object; and a second temperature regulating unit which regulates the temperature of the treatment liquid to be transferred from the second tank to the first tank by the transfer unit.
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