Misalignment indication decision system and method
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United States of America Patent
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Sep 16, 2014
Grant Date -
May 17, 2012
app pub date -
Nov 11, 2010
filing date -
Nov 11, 2010
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Abstract
Systems and methods for deciding whether or not to indicate misalignment. In some examples, an analysis of parametric data relating to tests sensitive to misalignment is performed in order to determine which data is incongruous and to identify corresponding probes or socket contacts as suspected misaligned. In some examples, additionally or alternatively, a spatial analysis quantifies the placement of a set of identified suspected misaligned probes, which were identified from pass/fail test data and/or parametric test data, with respect to a contiguous or non-contiguous area on one or more wafers.
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