Supply of a liquid-metal target in X-ray generation

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United States of America Patent

PATENT NO 8837679
APP PUB NO 20120057680A1
SERIAL NO

13262499

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Abstract

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Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.

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Patent Owner(s)

Patent OwnerAddress
EXCILLUM AB164 40 KISTA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hemberg, Oscar Stockholm, SE 23 521
Otendal, Mikael Stockholm, SE 3 26
Tuohimaa, Tomi Stockholm, SE 22 106

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