Method for manufacturing workpieces and apparatus

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United States of America Patent

PATENT NO 8834969
APP PUB NO 20090106968A1
SERIAL NO

12256543

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Abstract

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For vacuum treatment of workpieces by a multitude of distinct processing stations (P11-P1n, P21-P2m) the processing stations are grouped in two groups (I and II). The workpieces are handled towards and from the processing stations of the first group (I) simultaneously, whereat the workpieces are treated by the processing stations of the second group (II) in a selectable individual sequence.

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Patent Owner(s)

Patent OwnerAddress
EVATEC AGSWISS TE LUI BACH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heinz, Bernd Buchs, CH 19 66

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