Planar mirco-tube discharger structure and method for fabricating the same
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United States of America Patent
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Sep 9, 2014
Grant Date -
Aug 29, 2013
app pub date -
May 4, 2012
filing date -
Feb 24, 2012
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Abstract
The present invention discloses a semiconductor-based planar micro-tube discharger structure and a method for fabricating the same. The method comprises steps: forming on a substrate two patterned electrodes separated by a gap and at least one separating block arranged in the gap; forming an insulating layer over the patterned electrodes and the separating block and filling the insulating layer into the gap. Thereby are formed at least two discharge paths. The method can fabricate a plurality discharge paths in a semiconductor structure. Therefore, the structure of the present invention has very high reliability and reusability.
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