Time-of-flight spectrometry and spectroscopy of surfaces
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United States of America Patent
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Sep 9, 2014
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Jun 23, 2011
app pub date -
Nov 30, 2010
filing date -
Nov 30, 2009
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Abstract
Described is an analytical method and apparatus for counting and measuring the flight time of secondary electrons, secondary ions and neutrals, scattered ions and/or neutrals and for correlating coincidences between these while maintaining a continuous un-pulsed, micro-focused, primary particle beam for impinging a surface for purposes of microprobe imaging and microanalysis.
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