Supporting device for a magnetron assembly with a rotatable target

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United States of America Patent

PATENT NO 8828199
SERIAL NO

12956546

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A support device for a magnetron arrangement with a rotating target includes a housing with a drive shaft mounted to rotate in the housing. An end of the drive shaft accessible from outside of the housing connects to the rotating target and another end lies within the housing for introduction of a torque. An electric motor with a stator and a rotor is arranged within the housing to generate a torque.

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Patent Owner(s)

Patent OwnerAddress
VON ARDENNE ANLAGENTECHNIK GMBHPLATTLEITE 19/29 DRESDEN 01324

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grune, Harald Dresden, DE 4 8
Haehne, Sven Dresden, DE 4 11
Heinrich, Hans-Jürgen Groβröhrsdorf, DE 4 30
Teschner, Goetz Dresden, DE 10 129

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