Cover for a roller
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United States of America Patent
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Sep 9, 2014
Issued Date -
N/A
app pub date -
Jul 14, 2009
filing date -
Jul 17, 2008
priority date (Note) -
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Abstract
A cover for a roller having at least one roller (2) for transporting a substrate (1) in a deposition system and at least one cover means (6), wherein the roller is retractable away from the substrate and the cover means is adapted for at least partly covering the retracted roller against contamination by a substance present in the deposition system. The cover for a roller has the advantage that the uptime of the deposition system is increased.
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