Temperature sensor and heat treating apparatus
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United States of America Patent
Stats
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Sep 2, 2014
Grant Date -
Jul 31, 2014
app pub date -
Jan 28, 2013
filing date -
Feb 10, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A temperature detecting element is fixed reliably at an accurate position to enable improvement in a rising characteristic of a temperature and high-accuracy temperature control. Provided is a temperature sensor including a temperature detecting element detecting a temperature in a branch tube branched from a main tube and a positioning supporting mechanism positioning and supporting the temperature detecting element. Tension is applied to a cord of the temperature detecting element. The positioning supporting mechanism is supported by the tensioned cord to position and support the temperature detecting element. The positioning supporting mechanism includes a supporting tube supporting the temperature detecting element, a positioning member supporting the supporting tube and fixed at a set position, and a tensioner applying tension to the cord of the temperature detecting element.

First Claim
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
TOKYO ELECTRON LIMITED | 3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325 | |
FENWAL CONTROLS OF JAPAN LTD | KYOHAN KUDAN BLDG 5-10 IIDABASHI 1-CHOME CHIYODA-KU TOKYO 102-0072 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Kurihara, Tsutomu | Tokyo, JP | 18 | 63 |
Okamura, Tomoya | Tokyo, JP | 2 | 10 |
Saito, Takanori | Oshu, JP | 113 | 2068 |
Yoshii, Koji | Oshu, JP | 31 | 562 |
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Fee | Large entity fee | small entity fee | micro entity fee | due date |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 2, 2026 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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