Temperature sensor and heat treating apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8821014
APP PUB NO 20140211830A1
SERIAL NO

13751653

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Abstract

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A temperature detecting element is fixed reliably at an accurate position to enable improvement in a rising characteristic of a temperature and high-accuracy temperature control. Provided is a temperature sensor including a temperature detecting element detecting a temperature in a branch tube branched from a main tube and a positioning supporting mechanism positioning and supporting the temperature detecting element. Tension is applied to a cord of the temperature detecting element. The positioning supporting mechanism is supported by the tensioned cord to position and support the temperature detecting element. The positioning supporting mechanism includes a supporting tube supporting the temperature detecting element, a positioning member supporting the supporting tube and fixed at a set position, and a tensioner applying tension to the cord of the temperature detecting element.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325
FENWAL CONTROLS OF JAPAN LTDKYOHAN KUDAN BLDG 5-10 IIDABASHI 1-CHOME CHIYODA-KU TOKYO 102-0072

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kurihara, Tsutomu Tokyo, JP 18 63
Okamura, Tomoya Tokyo, JP 2 10
Saito, Takanori Oshu, JP 113 2068
Yoshii, Koji Oshu, JP 31 562

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