Plasma chemical reactor
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United States of America Patent
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Aug 26, 2014
Grant Date -
May 21, 2009
app pub date -
Oct 20, 2008
filing date -
Nov 21, 2007
priority date (Note) -
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Abstract
A plasma chemical reactor includes a chamber for providing a plasma reaction space, and a cathode assembly coupled at one side to a wall surface of the chamber and supporting a substrate at the other side such that the substrate is positioned at a center inside the chamber, and installed to enable height adjustment such that the substrate can maintain a horizontal state.
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