Scanning probe microscope
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United States of America Patent
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Aug 19, 2014
Grant Date -
Feb 27, 2014
app pub date -
Aug 23, 2013
filing date -
Aug 24, 2012
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Abstract
A scanning probe microscope including: a scanning probe microscope unit section including, a cantilever having a probe, a cantilever holder configured to fix the cantilever, a sample holder on which a sample is configured to be placed, a horizontal fine transfer mechanism configured to relatively scan a surface of the sample with the probe, a vertical fine transfer mechanism configured to control a distance between the probe and the sample surface, an optical microscope configured to observe the cantilever and the sample; a control device; an imaging device to which a viewing field, wider than that of the optical microscope and capable of observing the cantilever and the sample at the same time, can be set; and an image display device configured to display images observed by the optical microscope and the imaging device.
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