Micro-mechanical component with cantilever integrated electrical functional element
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United States of America Patent
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Aug 19, 2014
Grant Date -
Sep 27, 2012
app pub date -
Mar 13, 2012
filing date -
Mar 24, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply lines on the two opposite flat surfaces of the cantilever and/or the support element. The functional element is supplied by the first supply line on a first flat surface, with the second supply line on the opposite flat surface serving as return line.
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International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B82Y:SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; ....
- H02N:ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....
- G01Q:SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIO....
- B81B:MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-ME....
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