Wafer-to-wafer stack with supporting pedestal

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United States of America Patent

PATENT NO 8810031
APP PUB NO 20110156249A1
SERIAL NO

12982046

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Importance

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Abstract

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An electronic device having a stacked structure is provided. The electronic device includes a first electronic layer, a second electronic layer disposed on the first electronic layer, and at least a post. The first electronic layer has a first interface, and including a first substrate and a first device layer disposed on the first substrate. The first interface is located between the first substrate and the first device layer, and the first device layer has a surface opposite to the first interface. The post is arranged in the first device layer, and extending from the first interface to the surface of the first device layer.

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Patent Owner(s)

Patent OwnerAddress
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTECHU-TUNG HSIN-CHU

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chi-Shih Hsinchu, TW 6 131
Lee, Rong-Shen Hsinchu, TW 16 617
Liau, Shyi-Ching Hsinchu, TW 20 348
Lo, Wei-Chung Hsinchu, TW 26 335
Tain, Ra-Min Hsinchu, TW 95 646

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