Process and apparatus for ablation
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United States of America Patent
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Aug 19, 2014
Grant Date -
Jun 6, 2013
app pub date -
Dec 19, 2012
filing date -
Jun 11, 2004
priority date (Note) -
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Abstract
An ablation method including a steps of ablating a region of a substrate (1) by a laser beam (3); and removing debris ablated from the region (1) by a flow of a fluid (7), namely, a gas or vapor, a liquid or a combination of the fluids. The flow of fluid (7) is directed to flow over the region so as to entrap debris and thereafter remove the entrapped debris from the region by directing the flow of fluid, with any entrapped debris, away from region along a predetermined path (6) avoiding subsequent deposition of entrapped debris on the substrate.
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