MEMS gyroscope for detecting rotational motions about an X-, Y-, and/or Z-axis
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United States of America Patent
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Jul 29, 2014
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app pub date -
Feb 11, 2010
filing date -
Feb 27, 2009
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Abstract
The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or Z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses (2) that are movable radially With respect to a center and drive elements (7) for the oscillating vibration of the drive masses (2) in order to generate Coriolis forces on the drive masses (2) in the event of rotation of the substrate about the x-, y-, and/or Z-axis. The oscillating drive masses (2) are connected to at least one further non oscillating sensor mass (3) that however can be rotated about the x-, y-, and/or Z-axis together With the oscillating drive masses (2) on the substrate. Sensor elements (9, 10) are used to detect detections of the sensor mass (3) and/or drive masses (2) in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors (5) are used to rotatably fasten the sensor mass (3) to the substrate by means of springs (4).
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