Table for receiving a workpiece and method for processing a workpiece on such table

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United States of America Patent

PATENT NO 8785812
SERIAL NO

11597856

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a device for the treatment of a workpiece, in particular of a substantially flat substrate, comprising a table (2) for supporting the workpiece (5), a flow generation apparatus (6, 11) producing a gas flow (22) on a top face (17.1, 17.2) of the table (2) in a region between the workpiece (5) and the top face (17.1, 17.2) of the table (2), on which gas flow the workpiece (5) is supported during the treatment.

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Patent Owner(s)

Patent OwnerAddress
OERLIKON SOLAR AG TRUEBBACHSWISS TE LUI BACH

International Classification(s)

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  • 2005 Application Filing Year
  • B26D Class
  • 359 Applications Filed
  • 135 Patents Issued To-Date
  • 37.61 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances200520062007200820092010201120122013201420152016201720180255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Büchel, Arthur Ruggell, LI 5 11
Grundmüller, Richard Münich, DE 2 143
Meier, Johannes Corcelles, CH 26 203

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Patent Citation Ranking

  • 1 Citation Count
  • B26D Class
  • 21.05 % this patent is cited more than
  • 11 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges60204154201 - 1011 - 2021 - 3041 - 500102030405060708090100110120130140150160170180190200210220

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