MEMS dynamic pressure sensor, in particular for applications to microphone production
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United States of America Patent
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Jul 22, 2014
Grant Date -
Jan 26, 2012
app pub date -
Jul 20, 2011
filing date -
Jul 22, 2010
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Abstract
A pressure sensor of the MEMS and/or NEMS type is disclosed, including:
- at least one first deformable cavity (20) to receive pressure variations from an ambient atmosphere, this first deformable cavity being made in a first substrate and including at least one mobile or deformable wall (25), arranged at least partially in the plane parallel to the first substrate, called plane of the sensor, pressure variations from an ambient atmosphere being transmitted to said cavity,a detector (24, 24′) for detecting a displacement or deformation, in the plane of the sensor, of said mobile or deformable wall, under the effect of a pressure variation of the ambient atmosphere.
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