Method and device for measuring a surface profile
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 22, 2014
Grant Date -
Apr 26, 2012
app pub date -
Nov 4, 2011
filing date -
May 7, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A measuring device (10) and method for measuring a surface profile of a workpiece. A measuring carriage (15) is moved in a straight line at a distance from the workpiece surface in a moving direction (x), without accelerating a carried probe tip (25). The free probe end (40) of the probe tip (25) rests on the workpiece surface (11) with a measuring force (Fm) and is deflected during the measurement in a measuring direction (z), transverse to moving direction (x), the surface profile causes a track-dependent deflection (zT) of the probe end (49). A measured value receiver (45) detects the deflecting value (s) describing the deflection of the probe end (40) in measuring direction (z). In an analyzing unit (21), a measuring force change value describing the change of the measuring force (Fm) between the probe end (40) and the workpiece surface (11) is formed for detecting measuring errors/inaccuracies.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully