Apparatus and method for generating extreme ultra violet radiation
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United States of America Patent
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Jul 15, 2014
Grant Date -
Jun 19, 2014
app pub date -
Dec 11, 2013
filing date -
Dec 18, 2012
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Abstract
An apparatus and a method for generating extreme ultra violet radiation are provided. The apparatus for generating extreme ultra violet radiation includes a light source, a first reflecting mirror on which source light emitted from the light source is incident, a second reflecting mirror on which first reflected light reflected by the first reflecting mirror is incident, a focus mirror on which second reflected light reflected by the second reflecting mirror is incident, the focus mirror reflecting third reflected light back to the second reflecting mirror, and a gas cell on which fourth reflected light reflected by the second reflecting mirror is incident.
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