Method of removing contamination from a reactor
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United States of America Patent
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Jul 15, 2014
Grant Date -
May 5, 2011
app pub date -
Nov 2, 2010
filing date -
Nov 4, 2009
priority date (Note) -
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Abstract
The present invention provides a method for removing metal and/or metal oxide contamination from the interior of a vacuum coating reactor, the method comprising the steps of: a) performing an idle coating step by depositing a coating layer, wherein the coating layer comprises silicon; b) at least partly removing the deposited coating layer. The method according to the invention is particularly suitable for cleaning reactors in the context of solar cell manufacturing. The method is time saving and cost saving.
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