Point source assembly for thin film deposition devices and thin film deposition devices employing the same
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United States of America Patent
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Jul 15, 2014
Grant Date -
Dec 13, 2012
app pub date -
Jun 7, 2011
filing date -
Jun 7, 2011
priority date (Note) -
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Abstract
A point source assembly for a thin film deposition device having a chamber for holding a substrate, includes a crucible configured for holding and vaporizing a deposition material therein, where the crucible is configured for operative engagement to the chamber, an opening in the crucible configured for directing therefrom a vaporized form of the deposition material, where the opening includes a longitudinal line extending through the center of the crucible opening, and means operatively engaged to the crucible for facilitating rotational movement of the crucible for varying the orientation of the longitudinal line relative to the position of the substrate in the chamber.
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