Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another
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United States of America Patent
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Jul 15, 2014
Grant Date -
Feb 2, 2012
app pub date -
Mar 8, 2010
filing date -
Mar 26, 2009
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Abstract
A micro gyroscope determine three-dimensional rotational movements is mounted on a substrate on which a plurality of masses tangentially oscillate about the z axis perpendicular to the substrate. The oscillating masses are fastened to the substrate by springs and bolts. Driving elements maintain oscillating tangential vibrations of the masses about the z axis. Upon rotation of the substrate about any spatial axis, the masses are subjected to deflections caused by Corolis forces that are detected by sensor elements. Certain masses oscillating about the z axis are tiltable about the x axis, while some others are tiltable about the y axis. At least one other mass is configured to deflect radially to the z axis in a x-y plane parallel to the plane of the substrate. This mass is assigned a sensor element that can deflect radially with respect to the axis but cannot oscillate about the z axis.
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