Carrier film for mounting polishing workpiece and method for making the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jul 1, 2014
Grant Date -
Feb 24, 2011
app pub date -
Oct 19, 2010
filing date -
Feb 15, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention relates to a carrier film for mounting a polishing workpiece. The carrier film comprises a surface substrate and a buffer substrate. The surface substrate consists of first elastomer, the first elastomer comprising a plurality of first holes; wherein the first holes have a drop shape, and each of the first holes has an opening. The buffer substrate consists of second elastomer, the second elastomer comprising a plurality of second holes. The surface substrate and the buffer substrate are adhered with adhesive comprising the first or the second elastomer. A method for making the carrier film is also provided. When polishing, the carrier film provides a good buffer property to conduct and release down force applied on the polishing workpiece.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| US | A1 | US20080200105 | Feb 15, 2007 |
International Classification(s)
- 2010 Application Filing Year
- B24B Class
- 467 Applications Filed
- 325 Patents Issued To-Date
- 69.60 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- B24B Class
- 9.02 % this patent is cited more than
- 11 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jan 1, 2026 |
