Apparatus and method of removing coating of line-shaped body using plasma

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United States of America Patent

PATENT NO 8758637
APP PUB NO 20090223929A1
SERIAL NO

12242025

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Abstract

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An apparatus of removing coatings of a line-shaped body of the invention includes a non-equilibrium atmospheric pressure plasma source with radicals controlled, having a plasma generating gas, a microwave, a micro gap; a line-shaped body holding portion for holding the line-shaped body within a range of 2 to 3 mm from an electrode to generate a plasma jet; and a moving stage for relatively moving the line-shaped body in the longitudinal direction thereof.

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Patent Owner(s)

Patent OwnerAddress
THE FURUKAWA ELECTRIC CO LTDTOKYO
MASARU HORI6-176 FUJITSUKA NISSHIN-SHI AICHI 470-0100

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirayama, Takeshi Tokyo, JP 44 484
Hori, Masaru Aichi, JP 89 2760
Koaizawa, Hisashi Tokyo, JP 23 147
Shu, Imei Tokyo, JP 1 0
Toda, Sadayuki Tokyo, JP 15 70

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