Inspection method and device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jun 17, 2014
Grant Date -
May 9, 2013
app pub date -
Jul 27, 2011
filing date -
Jul 29, 2010
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The high magnification, high resolution and real-time property of an SEM image are realized when the electrical characteristics of an inspection object are measured, without affecting the electrical characteristics of the inspection object. A high-quality, high-magnification first image including an image of a target position in the inspection object on a sample is acquired. Next, a low-quality, low-magnification second image including the image of the target position in the inspection object on the sample and probe images is acquired. Next, data on the first image is built into the second image to generate an image for coarse-access observation which is the same in magnification as the second image. The generation of the image for coarse-access observation is repeated until a probe comes close to the target position in the inspection object.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
HITACHI HIGH-TECH CORPORATION | MINATO-KU TOKYO 105-6409 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Ando, Tohru | Tokyo, JP | 21 | 95 |
# of filed Patents : 21 Total Citations : 95 | |||
Nara, Yasuhiko | Hitachinaka, JP | 51 | 566 |
# of filed Patents : 51 Total Citations : 566 |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 17, 2025 |
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