MEMS device with simplified electrical conducting paths
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United States of America Patent
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Jun 17, 2014
Grant Date -
Oct 4, 2012
app pub date -
Feb 21, 2012
filing date -
Mar 28, 2011
priority date (Note) -
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Abstract
A MEMS device comprises a substrate for manufacturing a moving MEMS component is divided into two electrically isolated conducting regions to allow the moving MEMS component and a circuit disposed on its surface to connect electrically with another substrate below respectively through their corresponding conducting regions, thereby the electrical conducting paths and manufacturing process can be simplified.
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