Plasma deposition on a partially formed battery through a mesh screen

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United States of America Patent

PATENT NO 8753724
APP PUB NO 20140087092A1
SERIAL NO

13627977

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Abstract

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A plasma deposition method deposits a battery component material on a partially fabricated battery cell comprising a battery component layer containing charge-carrying metal species and having an exposed surface. A mesh screen is maintained at a preset distance from the exposed surface, the mesh screen having a plurality of mesh openings. A process gas is energized to form a plasma by applying an electrical power to deposit the battery component material onto the exposed surface of the battery component layer. The mesh screen reduces migration of the charge-carrying metal species in the battery component layer to the exposed surface of the partially fabricated battery cell.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Krasnov, Victor Tarzana, US 21 897
Liang, Jiuh-Ming Hacienda Heights, US 15 257
Nieh, Kai Wei Monrovia, US 17 343

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