Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system
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United States of America Patent
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Jan 7, 2014
Grant Date -
Sep 13, 2012
app pub date -
Mar 7, 2011
filing date -
Mar 15, 2010
priority date (Note) -
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Abstract
A regenerative amplifier according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors constituting an optical resonator; a slab amplifier provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system disposed to configure a multipass optical path along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position as an optical image of the laser beam at a second position.
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