Method and device for the internal plasma treatment of hollow bodies

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United States of America Patent

PATENT NO 8747962
APP PUB NO 20090155490A1
SERIAL NO

12063761

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Abstract

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The invention relates to a method for the plasma treatment of workpieces, particularly workpieces in the form of hollow bodies, in which a treatment zone in a reactor chamber is at least partially evacuated, a process gas is introduced into the treatment zone, particularly into the cavity of the workpiece, and a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone, wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment.

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Patent Owner(s)

Patent OwnerAddress
SCHOTT AGGERMANY MAINZ MAINZ RHINELAND-PALATINATE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bicker, Matthias Mainz, DE 33 1320
Hormes, Robert Muellheim, DE 9 516
Lohmeyer, Manfred Nackenheim, DE 18 543

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