MEMS tunneling accelerometer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 10, 2014
Issued Date -
N/A
app pub date -
Jan 8, 2013
filing date -
Jun 29, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A tunneling accelerometer includes a proof mass that moves laterally with respect to a cap wafer. Either the proof mass or the cap wafer includes a plurality of tunneling tips such that the remaining one of proof mass and the cap wafer includes a corresponding plurality of counter electrodes. The tunneling current flowing between the tunneling tips and the counter electrodes will thus vary as the proof mass laterally displaces in response to an applied acceleration.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully