Method for manufacturing solar cell and solar cell manufactured by the same method
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United States of America Patent
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Jun 3, 2014
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app pub date -
Dec 20, 2010
filing date -
Oct 8, 2010
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Abstract
Disclosed are a method for manufacturing a solar cell by processing a surface of a silicon substrate for a solar cell, a solar cell manufactured by the method, and a substrate processing system for performing the method. The method for manufacturing a solar cell comprises protrusion forming step including wet-etching process and for forming a plurality of minute protrusions on a light receiving surface of a crystalline silicon substrate, and planarization step of planarizing the bottom surface, the opposite surface to the light receiving surface of the substrate during or after the protrusion forming step.
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