Characterization structure for an atomic force microscope tip
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United States of America Patent
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May 27, 2014
Grant Date -
Oct 31, 2013
app pub date -
Apr 24, 2013
filing date -
Apr 25, 2012
priority date (Note) -
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Abstract
A structure for the characterization of a tip of an atomic force microscope, the structure being produced on a substrate and including a first support element located above the substrate; a first characterization element with a constant thickness, the first characterization element being located above the first support element and having an upper flat surface and a lower flat surface covering the upper surface of the first support element with two zones extending beyond the upper surface of the first support element, each zone having a characterization surface at one end which is capable of coming into contact with a tip to be characterized, the upper surface and the lower surface of said first characterization element being parallel to the upper surface of the substrate.
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