Method of generating a hole or recess or well in a substrate
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United States of America Patent
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May 27, 2014
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N/A
app pub date -
Mar 1, 2010
filing date -
Feb 27, 2009
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Abstract
The present invention relates to a method of generating a hole or recess or well in an electrically insulating or semiconducting substrate, and to a hole or recess or well in a substrate generated by this method. The invention also relates to an array of holes or recesses or wells in a substrate generated by the method. The invention also relates to a device for performing the method according to the present invention.
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