Controlled polarity group III-nitride films and methods of preparing such films
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United States of America Patent
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May 27, 2014
Grant Date -
Jan 27, 2011
app pub date -
Sep 30, 2010
filing date -
May 11, 2005
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Abstract
The present invention provides methods of preparing Group III-nitride films of controlled polarity and substrates coated with such controlled polarity films. In particular, the invention provides substrate preparation steps that optimize the substrate surface for facilitating growth of a Group III-polar film, an N-polar film, or a selectively patterned film with both a Group III-polar portion and an N-polar portion in precise positioning. The methods of the invention are particularly suited for use in CVD methods.
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