Coating of shield surfaces in deposition systems
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United States of America Patent
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May 27, 2014
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app pub date -
Feb 2, 2012
filing date -
Feb 2, 2012
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Abstract
A deposition chamber shield having a stainless steel coating of from about 100 microns to about 250 microns thick wherein the coated shield has a surface roughness of between about 300 microinches and about 800 microinches and a surface particle density of less than about 0.1 particles/mm2 of particles between about 1 micron and about 5 microns in size and no particles below about 1 micron in size, and process for production thereof is disclosed.
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