Electron beam source and method of manufacturing the same

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United States of America Patent

PATENT NO 8723138
APP PUB NO 20120131785A1
SERIAL NO

13369340

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Abstract

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A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBH07745 JENA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Drexel, Volker Koenigsbronn, DE 14 272
Irmer, Bernd Munich, DE 5 8
Mantz, Ulrich Schelkingen, DE 22 301
Penzkofer, Christian Munich, DE 3 4

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1609132178244181453251401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0501001502002503003504004505005506006507007508008509009501000

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