Method of producing an acoustic wave device
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United States of America Patent
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May 13, 2014
Grant Date -
Sep 30, 2010
app pub date -
Dec 24, 2009
filing date -
Mar 25, 2009
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Abstract
A method of producing an acoustic wave device includes: forming an interdigital electrode on a piezoelectric substrate; forming a barrier film so as to cover the interdigital electrode; forming a medium on the barrier film; measuring a frequency characteristic of an acoustic wave excited by the interdigital electrode; and forming, in an excitation region, an adjustment region having a thickness different from other portions by patterning the barrier film or further providing an adjustment film. When forming the adjustment region, an area T of the adjusting area is adjusted in accordance with the measured frequency characteristic.
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