Liquid crystal display device and manufacturing method thereof
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United States of America Patent
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May 6, 2014
Issued Date -
Apr 5, 2012
app pub date -
Oct 4, 2011
filing date -
Oct 4, 2011
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Withdrawn
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Abstract
A liquid crystal display device intended for increasing the ON-current of a TFT in the pixel while suppressing variation of the ON-current, in which a semiconductor layer and a first n+-a-Si layer in the TFT are formed continuously by plasma CVD. The semiconductor layer and the first n+-a-Si layer are patterned simultaneously. Then, a second n+-a-Si layer is formed so as to cover the upper surface of the first n+-a-Si layer and the side portion of the semiconductor layer. The ON-current can be increased and variation of the ON-current of the TFT can be decreased by forming the first n+-a-Si layer continuously over the semiconductor layer.
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