Material for cleaning a substrate
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United States of America Patent
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May 6, 2014
Grant Date -
Mar 17, 2011
app pub date -
Nov 17, 2010
filing date -
Dec 30, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
Material for cleaning using a tri-state body are disclosed. A substrate having a particle deposited thereon is provided. A tri-state body that has a solid portion, liquid portion, and a gas portion is generated. A force is applied over the tri-state body to promulgate an interaction between the solid portion and the particle. The tri-state body is removed along with the particle from the surface of the substrate. The interaction between the solid portion and the particle causes the particle to be removed along with the tri-state body.
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