Array substrate including thin film transistor and method of fabricating the same
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United States of America Patent
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Apr 29, 2014
Grant Date -
Jun 13, 2013
app pub date -
Dec 8, 2011
filing date -
Dec 8, 2011
priority date (Note) -
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Abstract
An array substrate includes: a substrate; a gate line and a gate electrode on the substrate; a gate insulating layer on the gate line and the gate electrode, the gate insulating layer including a first insulator and a second insulator on the first insulator, wherein the first insulator includes an aluminum oxide material and has a first thickness, and the second insulator includes a hafnium oxide material and has a second thickness; an oxide semiconductor layer on the gate insulating layer over the gate electrode; a data line over the gate insulating layer; a source electrode and a drain electrode contacting the oxide semiconductor layer; a passivation layer on the data line, the source electrode and the drain electrode; and a pixel electrode on the passivation layer, the pixel electrode connected to a drain electrode through a drain contact hole.
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