Method of and apparatus for evaluating an optimal irradiation amount of an electron beam for drawing a pattern onto a sample
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United States of America Patent
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Apr 29, 2014
Grant Date -
Aug 1, 2013
app pub date -
Jul 27, 2011
filing date -
Sep 17, 2010
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Abstract
Stored energy is evaluated for each of segmented regions, and using the evaluated stored energy, an optimal irradiation amount for an electron beam is evaluated by a conjugate gradient method. The evaluated stored energy is used instead of calculating a determinant (Apk) in the procedure that includes calculation of the determinant (Apk) from among repeated calculation procedures that follow the conjugate gradient method and seek to answer a simultaneous linear equation (Ax=b) with a matrix (A) as a coefficient. Thus it is possible to evaluate the optimal irradiation amount for an electron beam with a high processing speed and a high degree of accuracy, and without expressly requiring the calculation of Apk, by managing the giant matrix (A) comprising numerous factors according to reduction of lines of circuitry in a circuit pattern.
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