Intrinsic absorber layer for photovoltaic cells

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United States of America Patent

PATENT NO 8709857
SERIAL NO

13395941

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Abstract

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So as to manufacture an intrinsic absorber layer of amorphous hydrogenated silicon within a p-i-n configuration a solar cell by PeCvD deposition upon a base structure, thereby improving throughput an simultaneously maintaining quality of the absorber layer, a specific processing regime is proposed, wherein in the reactor for depositing the addressed absorber layer a pressure of between 1 mbar and 1.8 mbar is established and a flow of silane and of hydrogen with a dilution of silane to hydrogen of 1:4 up to 1:10 and generating an RF plasma with a generator power of between 600 W and 1200 W per 1.4 m2 base structure surface to be coated.

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Patent Owner(s)

Patent OwnerAddress
TEL SOLAR AG9477 TRÜBBACH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bakehe-Ananga, Sylvie-Noelle Truebbach, CH 1 1
Benagli, Stefano Neuchatel, CH 8 10

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