Method of manufacturing of a semi-conductor element and semi-conductor element
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United States of America Patent
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Apr 22, 2014
Grant Date -
Jan 17, 2013
app pub date -
Jul 13, 2012
filing date -
Jul 15, 2011
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Abstract
A method of manufacturing of a semi-conductor element, comprising the following steps: providing a substrate, the substrate having a surface, the surface being partially coated with a coating and having at least one uncoated area, and growing a truncated pyramid of gallium nitride on the uncoated area, wherein the method comprises the following step: growing at least one gallium nitride column on the truncated pyramid.
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