Method of manufacturing semiconductor device

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United States of America Patent

PATENT NO 8703579
SERIAL NO

13186803

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Abstract

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A method of forming a semiconductor device is provided, including a step of forming a layer which absorbs light over one face of a first substrate, a step of providing a second substrate over the layer which absorbs light, a step of providing a mask to oppose the other face of the first substrate, and a step of transferring the part of the layer which absorbs light to the second substrate by irradiating the layer which absorbs light with a laser beam through the mask.

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Patent Owner(s)

Patent OwnerAddress
SEMICONDUCTOR ENERGY LABORATOR CO LTD398 HASE ATSUGI-SHI KANAGAWA-KEN 243

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Higa, Eiji Kanagawa, JP 14 289
Miyairi, Hidekazu Kanagawa, JP 310 9103
Moriwaka, Tomoaki Kanagawa, JP 86 900
Shimomura, Akihisa Kanagawa, JP 211 3295
Shoji, Hironobu Tokyo, JP 54 1403
Yamazaki, Shunpei Tokyo, JP 7534 239327

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