Pulsed electron source, power supply method for pulsed electron source and method for controlling a pulsed electron source
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United States of America Patent
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Apr 15, 2014
Grant Date -
Mar 10, 2011
app pub date -
Jan 8, 2009
filing date -
Jan 11, 2008
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Abstract
The invention relates to a pumped electron source (1) that includes an ionization chamber (4), an acceleration chamber (2) with an electrode (3) for extracting and accelerating primary ions and forming a secondary-electron beam, characterized in that the pumped electron source (1) includes a power supply (11) adapted for applying to the electrode (3) a positive voltage for urging a primary plasma (17) outside the acceleration chamber (2), and a negative voltage pulse for extracting and accelerating the primary ions and forming a secondary-electron beam.
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