Extreme ultraviolet light generation system
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United States of America Patent
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Apr 15, 2014
Grant Date -
May 3, 2012
app pub date -
Oct 28, 2011
filing date -
Oct 29, 2010
priority date (Note) -
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Abstract
An apparatus for generating extreme ultraviolet light by exciting a target material to turn the target material into plasma may include: a frame; a chamber in which the extreme ultraviolet light is generated; a target supply unit for supplying the target material into the chamber; a first connection member for connecting the frame and the chamber flexibly; a mechanism for fixing the target supply unit to the frame; and a second connection member for connecting the target supply unit to the chamber flexibly.
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