Multilayer microfluidic probe head and method of fabrication thereof
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United States of America Patent
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Apr 15, 2014
Grant Date -
Nov 15, 2012
app pub date -
Jul 30, 2012
filing date -
May 7, 2009
priority date (Note) -
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Abstract
A microfluidic probe head includes a first layer, a second layer, and a first tubing port extending from an upper face of the first layer. The first layer has a first via, enabling fluid communication between the first port and a lower face of the first layer. The second layer includes a first aperture on a face, and a first microchannel enabling fluid communication between an upper face of the second layer, facing the lower face of the first layer, and the first aperture. The head enables fluid communication between the first via and the first microchannel. At least a portion of the first microchannel is a groove open on the upper face of the second layer, closed by a portion of a lower face of a layer of the head. The probe head further comprises a second tubing port, a second via, a second aperture and a second microchannel.
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