Fluidic systems and methods of determining properties of fluids flowing therein
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United States of America Patent
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Apr 15, 2014
Grant Date -
Sep 8, 2011
app pub date -
Apr 25, 2011
filing date -
Feb 11, 2008
priority date (Note) -
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Abstract
Fluidic systems and methods of determining properties of fluids flowing therein. The fluidic systems and methods make use of a micromachined device that determines at least one property of the fluid within the system. The micromachined device includes a base structure on a substrate and a tube structure extending from the base structure and spaced apart from a surface of the substrate. The tube structure has at least one pair of geometrically parallel tube portions substantially lying in a plane, and at least one continuous internal passage defined at least in part within the parallel tube portions. A drive element induces vibrational movement of the tube structure in the plane of the tube structure and induces resonant vibrational movements in the tube portions in the plane of the tube structure. A sensing element senses deflections of each tube portion in the plane of the tube structure.
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