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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
GLOBALWAFERS CO LTD	NO 8 INDUSTRIAL EAST ROAD 2 SCIENCE-BASED INDUSTRIAL PARK HSINCHU

International Classification(s)

• C01B:NON-METALLIC ELEMENTS; COMPOUNDS THEREOF
• B01D:SEPARATION

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Ghetti, Gianfranco	Rho, IT	3	16

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Oct 8, 2025

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 08, 2014	US,8691055,B2   US8691055B2	GRANTED PATENT AS SECOND PUBLICATION
December 27, 2012	US,20120325645,A1   US20120325645A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 8691055

Processes for the purification of trichlorosilane or silicon tetrachloride

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