Enhancing accuracy of fast high-resolution X-ray diffractometry
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United States of America Patent
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Apr 1, 2014
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Jan 19, 2012
app pub date -
Jul 12, 2011
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Jul 13, 2010
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Abstract
A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.
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